Microresonator for mass sensing
Personnel:
Mian Wei
This project is focusing on development of capacitively-transduced high-Q micromechanical resonator with nanogap transducers for efficient generation of the second harmonic signals. Through employment of the nanogap capacitive transducers filled with atomic layer deposited (ALD) high-k dielectrics, the newly designed micromechanical resonators are anticipated to offer improved conversion efficiency (as compared to that of the best semiconductor diodes) for the generation of the second harmonics.