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MEMS resonator


Over the past decade, a great deal of research effort has been devoted to development of low-power and high-Q micromechanical resonators with a high quality factor (Q) suitable for bring the frequency reference and signal processing functionalities, such as oscillators, mixers and frond-end filters at higher frequency bands (e.g., UHF and beyond), on to a single chip.

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Piezoelectric and capacitive hybrid resonator


Two of the most demonstrated MEMS resonators are piezoelectric and electrostatic-based devices. Coincidently, it happens that both technologies advantages are each other's disadvantages. This research project proposes the idea of combining both piezoelectric and capacitive into one hybrid resonator.

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Miniature ion trap mass spectrometer

ion trap

Mass spectrometer (MS) is a powerful device for chemical analysis, which can be applied extensively in bioinformatics, medical analysis, network harsh environment monitoring, homeland securities and outer space physics. It is a prevalent trend to miniaturize mass spectrometer, to make them portable and capable of in-situ/real time testing.

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MEMS resonators.

This project is focusing on development of capacitively-transduced high-Q micromechanical resonator with nanogap transducers for efficient generation of the second harmonic signals. Through employment of the nanogap capacitive transducers filled with atomic layer deposited (ALD) high-k dielectrics, the newly designed micromechanical resonators are anticipated to offer improved conversion efficiency (as compared to that of the best semiconductor diodes) for the generation of the second harmonics.


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Microresonator for mass sensing

Ivan Rivera will carry out research on microfabrication and testing of the micromechanical resonator-based resonant mass sensor with strategically designed configuration to mitigate the energy losses when operating in the low vacuum, atmospheric pressure or even in the highly-viscous media. Such devices could potentially be employed as a key enabler for the next generation of the portable mass spectrometer.

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Plasma Enhanced ALD.

ion trap

This Project is focused on study of nanometer precision thin film depositions of both dielectrics and conducting materials, including reducing nucleation times often plaguing typical metal depositions by u sing plasma gases as co-reactants.

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ZnO nanowire

Project Introduction coming soon.

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Nanostructured MIM Capacitor for Energy Storage

Current work explores the fabrication of semiconductor nanostructures, known as Supercapacitors, Ultracapacitors or Electrochemical capacitors, for photovoltaics and energy storage applications using atomic layer deposition (ALD).

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Latest Updates

July 31, 2012

Julio passed his Ph.D defense.

Congratulations, Dr.Dewdney.

July 20, 2012

Lab Moving

Lab moving from ENB 149 to IDRB building.

May, 2012

I-Tsang passed his Ph.D candidate defense.