Current work explores the fabrication of semiconductor nanostructures, known as Supercapacitors, Ultracapacitors or Electrochemical capacitors, for photovoltaics and energy storage applications using atomic layer deposition (ALD). Supercapacitors are serving as the basis for the next energy systems and when compared to regular capacitors, have a higher energy density and capacity of storage due to the density of the surface area. Nanocapacitor structures have the potential to serve as the basis for the next-generation energy storage devices that make use of densely packed interfaces (multilayer/nanolaminates) and have the capability of delivering power to renewable energy sources. Nanostructured materials are becoming increasingly important due to properties such as high surface area and downscaling of technology (achieving densely packed structures from thin films).